Fabrication Engineering at the Micro- and Nanoscale
| By: | Stephen Campbell |
| Publisher: | Oxford University Press Academic US |
| Print ISBN: | 9780199861224 |
| eText ISBN: | 9780197547885 |
| Edition: | 4 |
| Format: | Page Fidelity |
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In the education area, Professor Campbell leads the University of Minnesota's participation in Nano-Link, an NSF sponsored regional center for nanotechnology education at the AAS level. He has designed and implemented a one-semester capstone experience Microelectronic Fabrication and created the text book as a result. Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, this fourth edition of Fabrication Engineering at the Micro- and Nanoscale provides a thorough and accessible introduction to all fields of micro and nano fabrication. The text covers the entire basic unit processes used to fabricate integrated circuits and other devices.