Mems/Nems
(1) Handbook Techniques and Applications Design Methods, (2) Fabrication Techniques, (3) Manufacturing Methods, (4) Sensors and Actuators, (5) Medical Applications and MOEMS| By: | Cornelius T. Leondes |
| Publisher: | Springer Nature |
| Print ISBN: | 9780387245201 |
| eText ISBN: | 9780387257860 |
| Edition: | 1 |
| Copyright: | 2006 |
| Format: | Page Fidelity |
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This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.