Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology
| By: | Saburo Nonogaki; Ueno Takumi; Toshio Ito |
| Publisher: | Taylor & Francis |
| Print ISBN: | 9780824799519 |
| eText ISBN: | 9781351830713 |
| Edition: | 1 |
| Copyright: | 1998 |
| Format: | Reflowable |
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Table of Contents
"Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology. Reviews the interaction of light, electron beams, and X-rays with resist materials."