Strain Effect in Semiconductors
Theory and Device Applications| By: | Yongke Sun; Scott E. Thompson; Toshikazu Nishida |
| Publisher: | Springer Nature |
| Print ISBN: | 9781489983152 |
| eText ISBN: | 9781441905529 |
| Edition: | 0 |
| Copyright: | 2010 |
| Format: | Page Fidelity |
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Strain Effect in Semiconductors: Theory and Device Applications presents the fundamentals and applications of strain in semiconductors and semiconductor devices that is relevant for strain-enhanced advanced CMOS technology and strain-based piezoresistive MEMS transducers. Discusses relevant applications of strain while also focusing on the fundamental physics pertaining to bulk, planar, and scaled nano-devices. Hence, this book is relevant for current strained Si logic technology as well as for understanding the physics and scaling for future strained nano-scale devices.