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Cover image for book Post-Processing Techniques for Integrated MEMS

Post-Processing Techniques for Integrated MEMS

By:Sherif Sedky
Publisher:Artech House, Inc.
Print ISBN:9781580539012
eText ISBN:9781580539029
Edition:1
Copyright:2005
Format:Page Fidelity

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This groundbreaking resource presents cutting-edge post-processing techniques for the monolithic integration of MEMS. You learn how to select MEMS structural layers that can be processed on top of standard pre-fabricated electronics and will optimize the performance and reliability of the MEMS device. Supported with over 240 illustrations, the book details a modular integration process that won’t modify the electronics fabrication process or impose any limitation for optimizing the physical properties of the MEMS structural layers.