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Cover image for book Mechanical Properties of Silicon Based Compounds: Silicides

Mechanical Properties of Silicon Based Compounds: Silicides

By:Joshua Pelleg
Publisher:Springer Nature
Print ISBN:9783030225971
eText ISBN:9783030225988
Edition:0
Copyright:2019
Format:Reflowable

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This book focuses on the mechanical properties of silicides for very large scale integration (VLSI) applications. It presents the fabrication process for bulk silicides and thin films, and list complete testing deformation for a variety of silicon based compounds. The author also presents dislocation in silicides, fatigue and fracture aspects. A special chapter is given on deformation in silicides in the nano scale. Composites and alloys are also considered.