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Cover image for book Wafer Fabrication

Wafer Fabrication

Automatic Material Handling System
By:Jie Zhang
Publisher:De Gruyter
Print ISBN:9783110486902
eText ISBN:9783110487237
Edition:1
Copyright:2018
Format:Reflowable

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This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research combined with cases studies. Written in a practical way, it is an essential reference for researchers and engineers in manufacturing and management.